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Corrosion Resisting Turbo Molecular Vacuum Pump Magnetically Levitated

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Corrosion Resisting Turbo Molecular Vacuum Pump Magnetically Levitated

Brand Name : KYKY

Model Number : CXF-200/1401E

Certification : CE

Place of Origin : China

MOQ : 1

Payment Terms : T/T, L/C

Delivery Time : 4weeks

Packaging Details : Wooden box for overseas shipment

Pumping Speed : 1401L/s

lubrication : Maglev

Flange : ISO-F/CF 200

Cooling : Water

name : Corrosion Resisting Turbo Molecular Vacuum Pump Magnetically Levitated

keyword : Turbo Molecular Pump

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Maglev Pump , CXF-200/1401 , Water cooling , On board

The electromagnetic bearing is also called ”active magnetic levitated bears”, consisting of a magnetic bearing, a sensor and a control system. This design has dynamic response and timely adjustment, the high-speed shafting and reliable operation.

The magnetically levitated molecular pumps are the pumps of which shafting is supported by virtue of magnetic force.

Series magnetically levitated molecular pumps are vacuum generation equipment developed by KYKY for meeting application requirements for fields of modern semiconductor manufacturing, chip manufacturing, industrial plating and scientific instruments.

Specifications:

Model CXF-200/1401
Pump Speed(l/s,Air) 1400
Compression Ratio >1×107
Ultimate Vacuum(Pa) ≤2×10-6
Inlet Flange DN200 ISO K(LF)
DN200 ISO F
DN200 ISO CF
Outlet Flange KF 40
Rotation Speed(rpm) 33000
Run-up Time(min) 6
VIB (mm) <0.05
Backing Pump (L/s) 15
Mounting or ientation Any
Cooling method Water
Weight(kg)(With Controller) 51

Product Tags:

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